
Dimensional inspection machines, instruments, or systems, as follows: a. Computer controlled or numerically controlled coordinate measuring machines (CMM) having both of the following characteristics: 1. Two or more axes; and 2. A maximum permissible error of length measurement (E0, MPE) along any axis (one dimensional), identified as E0x, E0y, or E0z, equal to or less (better) than (1.25 + L/1000) μm (where L is the measured length in mm) at any point within the operating range of the machine (i.e., within the length of the axis), tested according to ISO 10360-2(2009). b. Linear displacement measuring instruments, as follows: 1. Non-contact type measuring systems with a "resolution" equal to or better (less) than 0.2 μm within a measuring range up to 0.2 mm; 2. Linear variable differential transformer (LVDT) systems having both of the following characteristics: a. "Linearity" equal to or better (less) than 0.1% within a measuring range up to 5 mm; and b. Drift equal to or better (less) than 0.1% per day at a standard ambient test room temperature ± 1 K; 3. Measuring systems having both of the following characteristics: a. Contain a laser; and b. Maintain for at least 12 hours, over a temperature range of ± 1 K around a standard temperature and a standard pressure: 1. A "resolution" over their full scale of 0.1 μm or better; and 2. With a "measurement uncertainty" equal to or better (less) than (0.2 + L/2000) μm (L is the measured length in millimeters);