Last Updated: April 11, 2026
Last Updated: April 11, 2026
Vacuum pumps of a kind used for the manufacture of semiconductors or solely or principally used for the manufacture of flat panel displays
Code
8414 10 15
EU Code
X.A.VIII.009.a
Category
ANNEX VII - List of goods and technology referred to in Articles 2a(1) and 2b(1)
Subcategory
Miscellaneous items
Prohibited Supply To
RUAuthority
EU
Document
EU Regulation 833/2014
Note
UHV pumps (sublimation, turbomolecular, diffusion, cryogenic, ion getter)
Program information
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